超純水電阻率≥2～10 MΩ.cm25℃ <BR>顆粒物（＞0.22μm ）＜1個/ml <BR>重金屬＜0.01ppm <BR>                       純水水質：電阻率>0.2MΩ.cm (進水電導率<300μs/cm) <BR>                                      取水流速:1～1.5升/分 <BR>                                      進水水源:市政自來水 <BR>                                      進水壓力: >0.1MPa <BR>                                      進水水溫：2～40℃ <BR>                                      工作電源:220V/50Hz